您好,欢迎来到海南中小企业大数据中心及公共服务平台!     请登录   免费注册
专利概况
专利名称 PIXEL FOR UNCOOLED INFRARED FOCAL PLANE DETECTOR AND PREPARATION METHOD THEREFOR
申请号 US16337868 申请日
公开(公告)号 US20200027916A1 公开(公告)日
申请(专利权)人 YANTAI RAYTRON TECHNOLOGY CO LTD 发明人 Hongchen WANG; Peng WANG; Wenli CHEN; Dong QIU
专利来源 国家知识产权局 转化方式
摘要

Provided are a pixel of an uncooled infrared focal plane detector and a preparation method therefor. The pixel includes a structure of three layers sequentially located on a semiconductor substrate from bottom to top. The first layer is a bridge structure including a metal reflection layer, an insulation dielectric layer, a first supporting layer, a first support layer protection layer, a first metal electrode layer and a first silicon nitride dielectric layer. The second layer is a thermal conversion structure including a second support layer, a second support layer protection layer, a thermal sensitive layer, a thermal sensitive layer production layer, a second metal electrode layer and a second silicon nitride dielectric layer. The third layer is an absorption structure including a third support layer, an absorption layer and an absorption layer protection layer.

参与列表