专利名称 | PIXEL FOR UNCOOLED INFRARED FOCAL PLANE DETECTOR AND PREPARATION METHOD THEREFOR | ||
申请号 | US16337868 | 申请日 | |
公开(公告)号 | US20200027916A1 | 公开(公告)日 | |
申请(专利权)人 | YANTAI RAYTRON TECHNOLOGY CO LTD | 发明人 | Hongchen WANG; Peng WANG; Wenli CHEN; Dong QIU |
专利来源 | 国家知识产权局 | 转化方式 | |
摘要 |
Provided are a pixel of an uncooled infrared focal plane detector and a preparation method therefor. The pixel includes a structure of three layers sequentially located on a semiconductor substrate from bottom to top. The first layer is a bridge structure including a metal reflection layer, an insulation dielectric layer, a first supporting layer, a first support layer protection layer, a first metal electrode layer and a first silicon nitride dielectric layer. The second layer is a thermal conversion structure including a second support layer, a second support layer protection layer, a thermal sensitive layer, a thermal sensitive layer production layer, a second metal electrode layer and a second silicon nitride dielectric layer. The third layer is an absorption structure including a third support layer, an absorption layer and an absorption layer protection layer. |